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PD ISO/TR 16268:2009 | British Standards

Standards Shop | ICS 71 | ICS 71.040 |  ICS 71.040.30

71.040.30 Chemical reagents

Surface chemical analysis. Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation

Surface chemical analysis. Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation

PD ISO/TR 16268:2009

Surface chemical analysis. Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation


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ISBN: 9780580557644

Keywords:
Control samples, Substrates (insulating), Chemical analysis and testing, Surface chemistry, Surfaces, Ions, Measurement, Silicon, Certification (approval), PDF
Publication Date30 Nov 2009
Product SKU30138808
ISBN9780580557644
BSI CodePD ISO/TR 16268:2009
No. of pages30
PublisherBritish Standards Institution
Identical National Standard to:
  • ISO/TR 16268:2009




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