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BS ISO 23812:2009 | British Standards

Standards Shop | ICS 71 | ICS 71.040 |  ICS 71.040.40

71.040.40 Chemical analysis

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth calibration for silicon using multiple delta-layer reference materials

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth calibration for silicon using multiple delta-layer reference materials

BS ISO 23812:2009

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth calibration for silicon using multiple delta-layer reference materials


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ISBN: 9780580557651

Keywords:
Depth measurement, Mass spectrometry, Calibration, Surface chemistry, Secondary, Chemical analysis and testing, Spectroscopy, Depth, Ions, Silicon, Surfaces, PDF
Publication Date31 May 2009
Product SKU30138811
ISBN9780580557651
BSI CodeBS ISO 23812:2009
No. of pages30
PublisherBritish Standards Institution
Identical National Standard to:
  • ISO 23812:2009




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