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BS ISO 21859:2019 | British Standards

Standards Shop | ICS 81 | ICS 81.060 |  ICS 81.060.30

81.060.30 Advanced ceramics

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

BS ISO 21859:2019

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment


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ISBN: 9780580962011

Keywords:
Semiconductor manufacture, Components, Plasma, Test methods, Ceramics, Special ceramics, PDF
Publication Date19-Jun-19
Product SKU30350531
ISBN9.78058E+12
BSI CodeBS ISO 21859:2019
No. of pages12
PublisherBritish Standards Institution
Identical National Standard to:
  • ISO 21859




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