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BS ISO 21466:2019 | British Standards

Standards Shop | ICS 37 |  ICS 37.020

37.020 Optical equipment

Microbeam analysis. Scanning electron microscopy. Method for evaluating critical dimensions by CDSEM

Microbeam analysis. Scanning electron microscopy. Method for evaluating critical dimensions by CDSEM

BS ISO 21466:2019

Microbeam analysis. Scanning electron microscopy. Method for evaluating critical dimensions by CDSEM


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ISBN: 9780580948404

Keywords:
Scanning electron microscopes, Electron microscopes, Dimensions, Evaluation, Electrons, Analysis, PDF
Publication Date18-Dec-19
Product SKU30344521
ISBN9.78058E+12
BSI CodeBS ISO 21466:2019
No. of pages56
PublisherBritish Standards Institution
Identical National Standard to:
  • ISO 21466




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