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BS ISO 17560:2014 | British Standards

Standards Shop | ICS 71 | ICS 71.040 |  ICS 71.040.40

71.040.40 Chemical analysis

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of boron in silicon

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of boron in silicon

BS ISO 17560:2014

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of boron in silicon


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ISBN: 9780580856365

Keywords:
Secondary, Boron, Chemical analysis and testing, Mass spectrometry, Ions, Spectroscopy, Surface chemistry, Determination of content, Depth, Silicon, PDF
Publication Date30 Sep 2014
Product SKU30296417
ISBN9780580856365
BSI CodeBS ISO 17560:2014
No. of pages22
ReplacesBS ISO 17560:2002
PublisherBritish Standards Institution
Identical National Standard to:
  • ISO 17560:2014




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