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BS ISO 17109:2022 - TC | British Standards

Standards Shop | ICS 71 | ICS 71.040 |  ICS 71.040.40

71.040.40 Chemical analysis

Tracked Changes. Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi..

Tracked Changes. Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi..

BS ISO 17109:2022 - TC

Tracked Changes. Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin films

This is a Tracked Changes version
Tracked Changes is a version of a standard that indicates a change has been made, during the standards revision process, between the active standard and its previous version. Additions, deletions, and other formatting and/or content revisions are clearly displayed as underlined and strike through texts, ensuring all changes made between the two documents are quickly and easily identified




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ISBN: 9780539242546

Keywords:
Depth, Auger electron spectroscopy, Photoelectron spectroscopy, Films (states of matter), Ions, Measurement, Analysis, X-ray photoelectron spectroscopy, Thin films, Calibration, Surfaces, Spectroscopy, Chemical analysis and testing, PDF
Publication Date03 Jan 2023
Product SKU30463341
ISBN9780539242546
BSI CodeBS ISO 17109:2022 - TC
No. of pages68
CategoryTracked
PublisherBritish Standards Institution




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