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BS ISO 14706:2014 | British Standards

Standards Shop | ICS 71 | ICS 71.040 |  ICS 71.040.40

71.040.40 Chemical analysis

Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

BS ISO 14706:2014

Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy


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ISBN: 9780580827259

Keywords:
Fluorimetry, Chemical analysis and testing, Density, Epitaxial layers, Surfactants, Contamination, Surfaces, X-ray analysis, Reflection, X-ray fluorescence spectrometry, Surface properties, Silicon, Contaminants, Surface chemistry, Substrates (insulating), Atoms, PDF
Publication Date31 Jul 2014
Product SKU30281605
ISBN9780580827259
BSI CodeBS ISO 14706:2014
No. of pages36
ReplacesBS ISO 14706:2000
PublisherBritish Standards Institution
Identical National Standard to:
  • ISO 14706:2014




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