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BS ISO 12406:2010 | British Standards

Standards Shop | ICS 71 | ICS 71.040 |  ICS 71.040.40

71.040.40 Chemical analysis

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon

BS ISO 12406:2010

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon


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ISBN: 9780580668746

Keywords:
Surface chemistry, Arsenic, Interferometry, Depth, Determination of content, Chemical analysis and testing, Silicon, Surfaces, Ions, Profile measurement, Mass spectrometry, Secondary, PDF
Publication Date30 Nov 2010
Product SKU30199170
ISBN9780580668746
BSI CodeBS ISO 12406:2010
No. of pages24
PublisherBritish Standards Institution
Identical National Standard to:
  • ISO 12406:2010




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