BS IEC 63068-4:2022 | British Standards

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31.080.99 Other semiconductor devices

Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence

BS IEC 63068-4:2022

Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence


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