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BS IEC 62047-52:2026 | British Standards

Standards Shop | ICS 31 | ICS 31.080 |  ICS 31.080.99

31.080.99 Other semiconductor devices

Semiconductor devices - Micro-electromechanical devices Part 52: Biaxial tensile testing method for stretchable MEMS

Semiconductor devices - Micro-electromechanical devices Part 52: Biaxial tensile testing method for stretchable MEMS

BS IEC 62047-52:2026

Semiconductor devices - Micro-electromechanical devices Part 52: Biaxial tensile testing method for stretchable MEMS


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ISBN: 9780539333909

Keywords:
Semiconductor manufacture, Semiconductor materials, Semiconductor technology, Electronic equipment and components, Semiconductor devices, Tensile testing equipment, Tensile testing, PDF
Publication Date10 Mar 2026
Product SKU30500240
ISBN9780539333909
BSI CodeBS IEC 62047-52:2026
No. of pages18
PublisherBritish Standards Institution
Identical National Standard to:
  • IEC 62047-52:2026




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