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BS IEC 62047-46:2025 | British Standards

Standards Shop | ICS 31 | ICS 31.080 |  ICS 31.080.99

31.080.99 Other semiconductor devices

Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane

Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane

BS IEC 62047-46:2025

Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane


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ISBN: 9780539218503

Keywords:
Semiconductor technology, Silicon, Measurement, Tensile strength, Membrane switches, Thickness, PDF
Publication Date30 Apr 2025
Product SKU30454371
ISBN9780539218503
BSI CodeBS IEC 62047-46:2025
No. of pages18
PublisherBritish Standards Institution
Identical National Standard to:
  • IEC 62047-46 Ed.1.0




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