BS IEC 62047-46:2025 | British Standards

Standards Shop | ICS 31 | ICS 31.080 |  ICS 31.080.99

31.080.99 Other semiconductor devices

Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane

BS IEC 62047-46:2025

Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane


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