BS IEC 62047-30:2017 | British Standards

Semiconductor devices. Micro-electromechanical devices Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

BS IEC 62047-30:2017

Semiconductor devices. Micro-electromechanical devices Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

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ISBN: 9780580935787

Keywords:
Thin-film circuits, Integrated circuit manufacture, Semiconductor technology, Electromechanical devices, Electronic equipment and components, Semiconductor devices, PDF

Publication Date	09 Oct 2017
Product SKU	30338637
ISBN	9780580935787
BSI Code	BS IEC 62047-30:2017
No. of pages	24
Publisher	British Standards Institution

Identical National Standard to:

IEC 62047-30:2017

BS IEC 62047-30:2017 | British Standards

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