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BS EN 62047-26:2016 | British Standards

Standards Shop | ICS 31 | ICS 31.080 |  ICS 31.080.99

31.080.99 Other semiconductor devices

Semiconductor devices. Micro-electromechanical devices Description and measurement methods for micro trench and needle structures

Semiconductor devices. Micro-electromechanical devices Description and measurement methods for micro trench and needle structures

BS EN 62047-26:2016

Semiconductor devices. Micro-electromechanical devices Description and measurement methods for micro trench and needle structures


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ISBN: 9780580853098

Keywords:
Thin films, Semiconductor devices, Test equipment, Electronic equipment and components, Test specimens, Integrated circuits, Tensile testing, Semiconductor technology, Electromechanical devices, PDF
Publication Date31 May 2016
Product SKU30294911
ISBN9780580853098
BSI CodeBS EN 62047-26:2016
No. of pages34
PublisherBritish Standards Institution
Identical National Standard to:
  • EN 62047-26:2016
  • EN 60793-2-30:2009
  • IEC 62047-26:2016




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