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BS EN 62047-21:2014 | British Standards

Standards Shop | ICS 31 | ICS 31.080 |  ICS 31.080.99

31.080.99 Other semiconductor devices

Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials

Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials

BS EN 62047-21:2014

Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials


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ISBN: 9780580775543

Keywords:
Vibration, Semiconductor technology, Fatigue testing, Test specimens, Semiconductor devices, Resonance, Electronic equipment and components, Test equipment, Thin-film devices, Bend testing, Electromechanical devices, Integrated circuits, PDF
Publication Date31 Oct 2014
Product SKU30257240
ISBN9780580775543
BSI CodeBS EN 62047-21:2014
No. of pages18
PublisherBritish Standards Institution
Identical National Standard to:
  • EN 62047-21:2014
  • IEC 62047-21:2014




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