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BS EN 62047-17:2015 | British Standards

Standards Shop | ICS 31 | ICS 31.080 |  ICS 31.080.99

31.080.99 Other semiconductor devices

Semiconductor devices. Micro-electromechanical devices Bulge test method for measuring mechanical properties of thin films

Semiconductor devices. Micro-electromechanical devices Bulge test method for measuring mechanical properties of thin films

BS EN 62047-17:2015

Semiconductor devices. Micro-electromechanical devices Bulge test method for measuring mechanical properties of thin films


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ISBN: 9780580722035

Keywords:
Test specimens, Semiconductor technology, Electromechanical devices, Test equipment, Axial stress, Tensile testing, Semiconductor devices, Electronic equipment and components, Thin films, PDF
Publication Date31 Jul 2015
Product SKU30231584
ISBN9780580722035
BSI CodeBS EN 62047-17:2015
No. of pages34
PublisherBritish Standards Institution
Identical National Standard to:
  • EN 62047-17:2015
  • IEC 62047-17:2015




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