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BS EN 62047-12:2011 | British Standards

Standards Shop | ICS 31 | ICS 31.080 |  ICS 31.080.99

31.080.99 Other semiconductor devices

Semiconductor devices. Micro-electromechanical devices Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures

Semiconductor devices. Micro-electromechanical devices Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures

BS EN 62047-12:2011

Semiconductor devices. Micro-electromechanical devices Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures


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ISBN: 9780580763014

Keywords:
Semiconductor devices, Test equipment, Vibration, Bend testing, Fatigue testing, Integrated circuits, Electromechanical devices, Test specimens, Thin-film devices, Semiconductor technology, Resonance, Electronic equipment and components, PDF
Publication Date30 Nov 2011
Product SKU30245341
ISBN9780580763014
BSI CodeBS EN 62047-12:2011
No. of pages34
PublisherBritish Standards Institution
Identical National Standard to:
  • IEC 62047-12:2011
  • EN 62047-12:2011




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