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BS EN 62047-11:2013 | British Standards

Standards Shop | ICS 31 | ICS 31.080 |  ICS 31.080.99

31.080.99 Other semiconductor devices

Semiconductor devices. Micro-electromechanical devices Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

Semiconductor devices. Micro-electromechanical devices Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

BS EN 62047-11:2013

Semiconductor devices. Micro-electromechanical devices Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems


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ISBN: 9780580694486

Keywords:
Electromechanical devices, Semiconductor technology, Terminology, Integrated circuits, Vocabulary, Semiconductor devices, Electronic equipment and components, PDF
Publication Date31 Oct 2013
Product SKU30211447
ISBN9780580694486
BSI CodeBS EN 62047-11:2013
No. of pages24
PublisherBritish Standards Institution
Identical National Standard to:
  • EN 62047-11:2013
  • IEC 62047-11:2013




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