BS ISO 14706:2014 | British Standards

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Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

BS ISO 14706:2014

Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

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ISBN: 9780580827259

Keywords:
Fluorimetry, Chemical analysis and testing, Density, Epitaxial layers, Surfactants, Contamination, Surfaces, X-ray analysis, Reflection, X-ray fluorescence spectrometry, Surface properties, Silicon, Contaminants, Surface chemistry, Substrates (insulating), Atoms, PDF

Publication Date	31 Jul 2014
Product SKU	30281605
ISBN	9780580827259
BSI Code	BS ISO 14706:2014
No. of pages	36
Replaces	BS ISO 14706:2000
Publisher	British Standards Institution

Identical National Standard to:

ISO 14706:2014

BS ISO 14706:2014 | British Standards

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