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BS EN 62047-10:2011 | British Standards

Standards Shop | ICS 31 | ICS 31.080 |  ICS 31.080.99

31.080.99 Other semiconductor devices

Semiconductor devices. Micro-electromechanical devices Micro-pillar compression test for MEMS materials

Semiconductor devices. Micro-electromechanical devices Micro-pillar compression test for MEMS materials

BS EN 62047-10:2011

Semiconductor devices. Micro-electromechanical devices Micro-pillar compression test for MEMS materials


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ISBN: 9780580694479

Keywords:
Compression testing, Semiconductor technology, Test specimens, Electronic equipment and components, Stress, Integrated circuits, Electromechanical devices, Semiconductor devices, Strain measurement, PDF
Publication Date30 Sep 2011
Product SKU30211443
ISBN9780580694479
BSI CodeBS EN 62047-10:2011
No. of pages18
PublisherBritish Standards Institution
Identical National Standard to:
  • IEC 62047-10:2011
  • EN 62047-10:2011




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